Vacuum system basic parameters

Vacuum furnace variety, the requirements of the vacuum system is not the same. In terms of vacuum, there are low vacuum, medium vacuum and high vacuum systems. Here are a few commonly used vacuum system.

1. Low vacuum system
It is suitable for vacuum in the range of 1333 ~ 2Pa vacuum heat treatment furnace, such as pre-pumping low vacuum furnace furnace. Most of the oil-based rotary mechanical pump for the main pump system.

2. medium vacuum system
It is suitable for vacuum heat treatment furnace in the range of 1.333 ~ 3 × 10Pa. Vacuum systems are the most widely used in vacuum heat treatment furnaces, and are usually composed of two-stage vacuum pump units. The primary pump uses a rotary mechanical pump or a spool type mechanical pump. The main pump is a mechanical booster pump (Roots pump) or oil booster pump.

3. High vacuum system
It is suitable for the vacuum in the 1.333 × 10 ~ 6.6 × 10Pa range of vacuum heat treatment furnace, such as vacuum annealing furnace, vacuum brazing furnace. It is usually composed of three vacuum pump unit, the main pump is usually used oil diffusion pump, ion pump, primary pump is also used rotary mechanical pump or slide valve mechanical pump, the former pump for the mechanical booster pump (Roots pump) or oil Booster pump.

Vacuum heat treatment furnace vacuum system, the main parameters of the ultimate vacuum, working vacuum, pumping time, pumping rate, leakage rate (pressure rate).

Ultimate vacuum vacuum furnace in the empty furnace, cold can achieve the highest degree of vacuum is called the ultimate vacuum. Ultimate vacuum is the assessment of the vacuum furnace parts of the processing and assembly quality, vacuum unit pumping capacity and ultimate vacuum, the furnace seal and leakage and vacuum hygiene of the important indicators. Typically, the ultimate vacuum of the vacuum furnace should be less than an order of magnitude of the main pump.