Vacuum Systems in Vacuum Furnace

Vacuum System
Three basic requirements for vacuum system of vacuum heat treatment furnace:
1) The vacuum degree of the vacuum heat treatment furnace can be pumped to the prescribed requirements quickly.
2) It can discharge all kinds of gases released from the treated workpiece and furnace inner components in time, and the gases infiltrated into the furnace body due to vacuum leakage.
3) Vacuum unit covers a small area, runs safely and reliably, and operates easily.

Vacuum System Composition
Vacuum system of vacuum heat treatment furnace usually consists of vacuum acquisition equipment (vacuum pump unit), control vacuum module and measurement vacuum module.
1) Vacuum pump unit. According to the working pressure and pumping volume of the furnace, different low vacuum pumps, medium vacuum pumps, high vacuum pumps and ultra-high vacuum pumps are selected.
2) Vacuum components or components. Various vacuum components or real-character components, such as pipelines, sealing rings, flanges, bellows, cold traps, filters and valves, are equipped between the vacuum furnace body and the vacuum pump unit.
3) Vacuum measuring system, such as vacuum gauge, vacuum pressure gauge and other vacuum measuring instruments.
4) Vacuum leak detector, vacuum control instrument, air charging device, etc.

There are many kinds of vacuum furnaces, which require different vacuum systems. In terms of vacuum, there are low, medium and high vacuum systems. Here are some common vacuum systems.

1. Low Vacuum System
The low vacuum system is suitable for vacuum heat treatment furnaces with 2 vacuum degrees, such as pre-pumped low vacuum well furnaces. Most of them are oil-sealed rotary mechanical pumps.

2. Medium Vacuum System
Medium vacuum system is suitable for vacuum heat treatment furnace with vacuum degree in 3 X10～1.333Pa range. Medium vacuum system is widely used in vacuum heat treatment furnace, which is usually composed of two-stage vacuum pump units. The primary pumps are mainly rotary mechanical pumps or sliding valve mechanical pumps, and the main pumps are mechanical booster pumps (Roots vacuum pumps) or oil booster pumps.

3. High Vacuum System
High vacuum system is suitable for vacuum heat treatment furnaces with vacuum degree of 6.6×10～1.333 X 10Pa, such as vacuum annealing furnaces and vacuum brazing furnaces. Usually it consists of three-stage vacuum pump units. The main pump usually uses oil diffusion vacuum pump and ion pump, and the primary pump mostly uses rotary mechanical pump or sliding valve mechanical pump.