vacuum heat treatment furnace leak detection

The oil quenching vacuum heat treatment furnace produced by our company is an example of leak detection on site. This paper introduces the leak detection method based on theoretical analysis and judgment in the absence of special leak detection instrument.

Leak detection of vacuum heat treatment furnace

Vacuum heat treatment furnace in the production of vacuum leak detection system is often a big problem. There are a lot of information about the leak detection technology. This paper mainly in the use of vacuum system failure of processing method is proposed, according to the different time, conditions, theoretical analysis, can determine the part of the leak could produce, find the hole leakage. According to field experience: with the analysis method for leakage than using leak detector leakage that reduce costs, and accommodate the general small plant does not have the shortage of the leak detection instrument. And the method to find leakage sometimes fast and accurate.

The leak detection of vacuum heat treatment furnace includes two parts: furnace body and vacuum system. When the furnace body and the vacuum system are assembled, no matter how reliable the seal is, there is always some leakage. Therefore, the leakage rate is used as an important performance index of heat treatment furnace.
Leakage rate refers to the flow of gas into the furnace through the leak hole per unit time, and the unit is Pa·L/s(or Torr·L/s). At present, the leakage rate of vacuum heat treatment furnace at home and abroad is expressed by pressure growth rate (boost rate). It is generally set at 0.7Pa/h(or 5 micron hg /h). As long as less than or equal to this value, the furnace leakage rate is qualified. We want as little leakage as possible. Because it can affect the ultimate vacuum of the chamber, but also the surface of the processed workpiece oxidation, reduce the brightness.