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How to operate the vacuum system of vacuum furnace
How to operate the vacuum system of vacuum furnace
In the vacuum system of low vacuum resistance furnace, there are only mechanical pumps or units composed of mechanical pumps and Roots pumps, so the operation is relatively simple. The operation of vacuum resistance furnace is divided into four steps from atmospheric state to working vacuum degree
1. Roots pump starts. Open the front stage valve, close the main valve and the pre pumping valve, and start the mechanical pump with the button. When the vacuum measured by the low vacuum gauge 2 is higher than the vacuum at the inlet of the roots pump, for example, less than 2KPa, start the roots pump.
2. Preheat the diffusion pump. The main valve and pre extraction valve are still closed, and the front pump unit vacuumizes the diffusion pump. When the vacuum degree of the front stage of the diffusion pump measured by the low vacuum gauge 2 is higher than the specified value, such as less than 7pa, start the diffusion pump heater.
3. Vacuum in pre extraction furnace. First, close the front stage valve, stop the roots pump, and then open the pre extraction valve to vacuumize the furnace. When the vacuum degree in the furnace is higher than that at the inlet of roots pump, start the roots pump. The front stage pump unit draws air from the furnace to make it reach the pre pumping vacuum degree.
4. High vacuum. When the vacuum degree in the furnace reaches or is higher than the specified value and the heating time of diffusion pump is up, first close the pre pumping valve, then open the high vacuum valve to pump high vacuum in the furnace until the vacuum degree in the furnace measured by the high vacuum gauge reaches or is higher than the working vacuum degree, then carry out the next operation. The closing steps of the vacuum system are relatively simple. When the furnace temperature is reduced to the requirements of the closed vacuum system, close the main valve, then close the diffusion pump heater, but the front valve cannot be closed, and the front pump unit is still working until the cooling time of the diffusion pump heater is up, then close the front valve and the front pump unit in turn.