Calibration of vacuum gauge in vacuum furnace

Calibration of resistance vacuum gauge
Resistance gauge is affected by manufacturing materials, process, assembly and other factors, and the performance of different resistance gauges in the same model is different. Therefore, it is necessary to calibrate the zero point and full degree of the vacuum gauge when using the new resistance gauge to reduce the measurement error. In addition, when the vacuum meter is used for a period of time, or the ambient temperature changes greatly, so that the display value of the vacuum meter is not 105Pa in the atmospheric measurement state, the zero point and full degree calibration should also be carried out. All resistance vacuum meters have zero calibration and full calibration buttons or knobs, which are adjusted according to the requirements of the instructions. Generally, the zero point should be calibrated before the full calibration.

(1) Calibrate the zero point. To calibrate the zero point, vacuum the vacuum system to be measured. Once the vacuum degree measured by the ionization gauge is higher than 1.0-1p (for example, 9.9 * 10-2Pa), press the “zero calibration” button, the corresponding indicator light will be on or Flash quickly, and the vacuum gauge will automatically calibrate the zero point. When 1.0-1pa is displayed, it means that the zero point of the gauge has been calibrated. For the resistance vacuum meter without automatic zero calibration, it can be adjusted manually through the potentiometer knob on the operation panel.

(2) Full correction. After the zero point is calibrated, its full degree shall be corrected. According to the requirements of the full calibration process, put the furnace chamber under test into the atmosphere, ensure that the position measured by the calibrated resistance gauge is in the atmospheric state, and work under the atmospheric pressure for about 10 minutes. Press the “full degree” button, the corresponding indicator light will be on or Flash quickly, and the vacuum gauge will automatically correct the full degree. When 1.05pa is displayed, it means that the gauge full degree has been calibrated. For the resistance vacuum meter without automatic full-scale calibration, it can be adjusted manually through the potentiometer knob on the operation panel.