Vacuum Furnace Maintenance

Vacuum Furnace Maintenance

1, In accordance with the PLC program drawn low vacuum: closed all vacuum valves, start mechanical pump, wait until after normal operation (about 1-2 min), open the way to the furnace of the low vacuum valve that is on the butterfly valve, pre-furnace Low vacuum pump body;
2.The high vacuum pumping PLC program: Open the next disc valves, diffusion pump suction, when the vacuum reaches 15 Pa or less, the system automatically turns on diffusion pump to warm up, usually after about 45 min diffusion pump begins its role, We can close the butterfly valve, the main barrier valve to be open at the same time a vacuum of 1.33 × 10Pa or more, before they can turn the heating button samples were heated.
Vacuum furnace maintenance equipment operator guides within the purview of the equipment point inspection of each site, with the correct test methods and tools for routine maintenance of equipment in accordance with point inspection cycle; the operator need daily basis this maintenance manual carefully fill out the “heat treatment equipment routine maintenance record “by the inspection team leader for review, maintenance staff collecting the archive. After a full set of equipment according to the technical requirements of the installation is complete, no missing parts and have a good grounding, you can press the following project commissioning and acceptance.