The furnace body structure of the vacuum furnace

1, the furnace:
The furnace body is a horizontal cylindrical double layer water cooling structure, including the shell, heating chamber, front door and rear furnace door. The material of the shell flange is stainless steel and the argon arc welding is adopted. Front and rear doors, front door loading. The furnace door is a full stainless steel double water cooled elliptical head structure, the feed end furnace door can open and close automatically, the other end of the furnace door pneumatic cylinder lock, side door open form. The furnace body is equipped with the pneumatic interface and valve, air release valve, standard temperature interface, leak detection interface and so on. Equipped with broadband high temperature alloy heater. The broadband heater and the water cooling furnace wall are equipped with a stainless steel thermal shield with a thickness of 0.5mm thick. The furnace door and the furnace body flange adopt the rubber sealing ring, reach the high vacuum seal requirement, the sealing performance is stable, reliable.
2. Vacuum system:
To rapidly eliminate the furnace chamber gas and material heat treatment in vivo gases emitted by a large number of impurities, maintain the furnace chamber vacuum conform to the requirements of the process, the device is configured with two groups extraction ability strong KT – 800 – a diffusion pump unit. The two diffusion pumps are equipped with oil baffle cap and temperature monitoring, equipped with a heating power regulator to prevent the return of oil. At the same time, in order to prevent the vacuum pump oil vapor from polluting the workpiece, the low-temperature freon cold trap was set up in the KT- 800A diffusion-pump port to improve the cleanliness of the vacuum chamber.

3. Cooling water system and heating chamber quick cooling system:
The cooling water system includes water distributor, water tank, valve, pipeline and all kinds of detecting elements. It has the functions of water pressure, water flow, water temperature and water shortage alarm and interlock. At the same time, in order to improve the efficiency of the equipment, the equipment is equipped with a gas rapid cooling system. The fast cooling system consists of switches, magnetic fluid seals, fast cooling fans, soft take-over, and take-over components. When the equipment runs to the rapid cooling process, the argon valve is opened and the high purity argon is filled into the furnace. In furnace gas pressure after reaching set point, the device of the fast cooling fan starts, in the hot air into the heat exchanger, heat exchange, after cooling of the gas by ventilation pipe into the furnace, cooling artifacts, such a cycle. In the process, when the pressure in the furnace is less than 70 kPa, the argon valve will be opened automatically and the argon will be added to the furnace.
4. Electric control system:
Electronic control system consists of industrial computer and industrial control configuration software, the data acquisition card, temperature controller (European) with communication, input and output module, PLC (with the corresponding I/O extension, communication interface), vacuum gauge output control, communication interface, etc. The electric control system is composed of several control cabinets (designed by the manufacturer), and the control cabinet panel has a vacuum system and a power supply heating system operation simulation diagram. At the same time the heating current, temperature and diffusion pump current display. The whole control system can be switched automatically and manually, and the operation (control) cabinet is equipped with the commonly used control buttons. The call and operation of the heating program can be operated from the upper computer and the master thermostat respectively. The operation box is installed near the furnace door, which is convenient for observation and control of feeding mechanism. The operation box includes feeding, discharging, stop and other buttons and indicator lights. Main circuit including low voltage fuse, fuse quickly, after vacuum unit block with a small transformer or power module instead of large magnetic tuning, reduce cover an area of an area, stable operation, energy conservation, environmental protection, low failure rate.