Daily emergency measures for vacuum sintering furnace

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The vacuum sintering furnace is mainly used for the sintering process of semiconductor components and power rectifier devices. It can be used for vacuum sintering, gas shielded sintering and conventional sintering. It is a novel process equipment in the series of special equipment for semiconductors. It has a novel design concept and convenient operation. The structure is compact, and multiple processes can be completed on one device. It can also be used in vacuum heat treatment, vacuum brazing and other processes in other fields. Below, the technical department of SIMUWU will introduce to you the possible problems and emergency measures of the vacuum sintering furnace.

Abnormal cooling water in high vacuum sintering furnace

1. Confirm that the heating power supply has stopped.

2. When water leakage occurs outside the furnace and the cooling water volume is abnormal, emergency measures should be taken as soon as possible. If the water volume can be guaranteed, please continue to maintain the vacuum. If emergency measures cannot be taken, keep the original condition and confirm that the equipment has cooled down.

3. When the cooling water is abnormal, the equipment is in a stopped state, and the emergency cooling water is immediately connected.

4. When the temperature is high (more than 200℃ is regarded as high temperature), if the cooling water stops, if the water cannot be sent urgently, the water-cooled electrode, heat exchanger, vacuum chamber shell and pumps may be damaged.

power failure

1. When the power is cut off, if the water is cut off, the spare cooling water should be connected immediately and the water source should be connected.

2. If the equipment can be recovered as soon as possible when it is not heating, heating or cooling, restart the equipment, and if it takes a long time to continue operation, keep the equipment in its original state.

3. If it is heating and cooling, restart the equipment when it can be recovered as soon as possible. If it takes a long time, keep it in the original state and let the equipment cool down naturally.

Some countries and regions have unstable voltages. For example, South Asia such as India and Pakistan are often troubled by power outages. Equipment should be equipped with generators and UPS power supplies to ensure the normal operation of core equipment during power outages. SIMUWU India vacuum furnace and Pakistan vacuum sintering furnace have corresponding vacuum system solutions.

SIMUWU engineers suggest that users of vacuum furnaces should buy gas (N2 and Ar2 gas, etc.) at regular gas filling stations and use gas with higher purity. If it is not convenient to buy gas

SIMUWU can provide a one-stop overall gas solution, such as using a nitrogen generator to provide high-purity nitrogen.

Heating power is off

1. The water pressure is low. When the water pressure is lower than 0.15MPa, the pressure gauge will give an alarm.

2. Ground fault.

3. For vacuum discharge, the connection between the water-cooled electrode connector and the heater must be firmly connected and insulated from the reflective screen.

4. If the pressure in the furnace is 13.3-66.5Pa (this vacuum is prone to discharge). The cause of power failure and power failure can be considered as the discharge caused by dielectric breakdown.

Fill gas (argon or nitrogen) stop

1. Before the start of vacuuming, if the gas filling time is long or cannot be filled, please confirm whether the gas pipeline is blocked.

2. If there is no problem with the gas pipeline, check the action of the solenoid valve and the gas filling valve. For safety, all related equipment must be stopped before checking.

3. In the case that the air filling into the vacuum chamber cannot be stopped, when the pressure relief valve operates, such as when the pressure relief valve operates, close all gas systems including the gas supply valve and piping.

4. Confirm whether there is any leak in the gas charging pipe, if any, it will affect the quality of the product.

Pressure in the vacuum chamber deteriorated

1. When the vacuum exhaust time is longer than usual, the equipment should be stopped for inspection. According to the influence of the deflation of the structure in the vacuum chamber under different conditions, the pressure may also increase.

2. Through pressure rise test or leak detection with helium gas to confirm the effect of air leakage and outgassing.

In a vacuum and protective atmosphere, heating and sintering metals, ceramics and some refractory metal intermediate compound powders. To obtain materials with a certain density and certain mechanical properties, two processes are generally used; namely, pressure sintering and pressureless sintering . The pressure sintering process is to place the powdered material in a high-carbon mold in a vacuum and protective atmosphere, and when it is heated to a softened state at a high temperature, it is press-formed. This process requires a vacuum hot pressing sintering to achieve. The sintering furnace has the characteristics of high temperature, high vacuum degree and high thermal pressure. SIMUWU provides a variety of vacuum pressure sintering equipment, which are widely used in the sintering heat treatment of ceramic products such as silicon carbide, boron carbide and boron nitride, and cemented carbide products such as tungsten carbide and tungsten-cobalt alloy.