Dry vacuum pump

Dry vacuum pump is the trend of future development of the industry, although now is not enough, in addition to the price plateau for outside, as well as user understanding of dry vacuum pump is not in place, can not see the future economic benefits to enterprises, small in here stresses under dry vacuum pump how to optimize?

For these different types of dry vacuum pumps, we are eager to reduce their physical size. But this is inconsistent with the pumping rate of the vacuum pump, because the pumping rate of the vacuum pump is proportional to the volume of the vacuum pump, and the physical size is small, which means that the volume is small. Of course, there is an important factor that affects the pumping rate of the vacuum pump, that is, the speed. In order to match the suction rate of a small size vacuum pump with the pumping rate of a large size vacuum pump, it is necessary to increase its rotational speed. There are two ways to change the speed of vacuum pump, one is to change the frequency of power supply, that is to adopt frequency converter; two, to change the transmission ratio of gear box. Among them, the inverter is good to provide a closed loop control, but under heavy load due to torque loss. It is a very economical way to change the transmission ratio of gear box, of course, it can only provide uncontrollable single rotation speed.

Now, you can see that there are so many different designs of dry vacuum pumps, each of which has its own characteristics, advantages and disadvantages. All along, the use of cost is an important factor affecting people to choose vacuum pumps. More and more vacuum pump users are aware of the need to take into account the stability of vacuum pumps. Because of the accidental error of the vacuum pump, the efficiency of the machine will be reduced, the production and delivery of the wafer will be affected, and even the scrap of the wafer and other parts of the machine will be damaged. Since the screw type design is a single-stage design, compared with the multi-stage pumps such as round lobe, claw and combination, the number of parts used is reduced by 60%. This makes it have a great advantage in stability and maintenance costs in the future.

Taken into account, if the user thinks power consumption is most important to him, and the amount of nitrogen is least important to him, then the choice of internal compression screw type can be a good choice. But generally speaking, the increasingly stringent requirements for tail gas treatment make it more important to reduce the amount of nitrogen in the future. If you want to use a single pump without changing the process to handle a variety of semiconductor processes, and make your inventory control simple, then the external compression screw type is your best choice.

According to the specific situation, the advantages of all the above design types must be the best choice, but it is not possible at present. Therefore, this requires users to first know that there are so many different design types in the design of dry pump, and then understand the influence of various types of pump design according to their own process characteristics. The choice is to reduce the cost of the system as much as possible, and to obtain a stable vacuum system with longer life.